Applications of X-ray scattering to electronic materials

Description
X-ray metrology is starting to play a significant role for material characterization or process control for technology nodes below the 45nm. In this talk, I will present Bruker AXS metrology solutions ranging from off line R & D characterization to fully automated in-line metrology for semiconductor manufacturing. Solutions are based on X-ray diffraction (XRR, XRD, HRXRD and micro HRXRD) and X-fluorescence (XRF and micro XRF). Materials of technological interests are: SiGe, exotic oxides, high and low /K/ dielectrics, new materials for interconnects, memory storage/spintronics, photovoltaics and MEMS.
Organised by Alessandra Alberti